%0 Conference Paper
%A Kluth, O.
%A Schöpe, G.
%A Hüpkes, J.
%A Agashe, C.
%A Müller, J.
%A Rech, B.
%T Modified thornton model for magnetron sputtered zinc oxide : film structure and etching behaviour
%M PreJuSER-24184
%D 2002
%Z Record converted from VDB: 12.11.2012
%< Proceedings of the 4th International Conference on Coatings on Glass : Braunschweig, Germany. - 2002. - S. 299
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/24184