TY  - CONF
AU  - Kluth, O.
AU  - Schöpe, G.
AU  - Hüpkes, J.
AU  - Agashe, C.
AU  - Müller, J.
AU  - Rech, B.
TI  - Modified thornton model for magnetron sputtered zinc oxide : film structure and etching behaviour
M1  - PreJuSER-24184
PY  - 2002
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
UR  - https://juser.fz-juelich.de/record/24184
ER  -