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@INPROCEEDINGS{Kluth:24184,
      author       = {Kluth, O. and Schöpe, G. and Hüpkes, J. and Agashe, C.
                      and Müller, J. and Rech, B.},
      title        = {{M}odified thornton model for magnetron sputtered zinc
                      oxide : film structure and etching behaviour},
      reportid     = {PreJuSER-24184},
      year         = {2002},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {Proceedings of the 4th International Conference on Coatings
                      on Glass : Braunschweig, Germany. - 2002. - S. 299},
      booktitle     = {Proceedings of the 4th International
                       Conference on Coatings on Glass :
                       Braunschweig, Germany. - 2002. - S.
                       299},
      cin          = {IPV},
      cid          = {I:(DE-Juel1)VDB46},
      pnm          = {Photovoltaik},
      pid          = {G:(DE-Juel1)FUEK247},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      url          = {https://juser.fz-juelich.de/record/24184},
}