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@INPROCEEDINGS{Lobe:255489,
      author       = {Lobe, Sandra and Tsai, Chih-Long and Finsterbusch, Martin
                      and Dellen, Christian and Uhlenbruck, Sven and Gehrke,
                      Hans-Gregor and Guillon, Olivier},
      title        = {{S}putter deposited {L}i7{L}a3{Z}r2{O}$_{12}$ as
                      electrolyte for thin film cells},
      reportid     = {FZJ-2015-05651},
      year         = {2015},
      abstract     = {Most commercial state-of-the-art batteries work with a
                      liquid organic electrolyte which might cause safety problems
                      due to an insufficient thermal and electrochemical
                      stability. Replacing the liquid by a solid electrolyte is
                      one approach to overcome these problems. Next to sulfides
                      and phosphates, oxide compounds like the garnet-structured
                      Li7La3Zr2O12 (LLZ) are promising materials for solid
                      electrolytes. LLZ exists in two modifications, a tetragonal
                      and a cubic, whereby the cubic high temperature phase shows
                      a higher Li-ion conductivity (about 10-4 S/cm). Further
                      advantageous properties of LLZ are its thermal (up to
                      1050°C) and electrochemical stability (up to 8V) which
                      allows its usage with high-voltage electrodes or in
                      batteries at elevated temperatures. Since the conductivity
                      is two orders of magnitude lower compared to organic
                      electrolytes the overall resistance can be lowered by
                      reduction to a thin electrolyte layer in all-solid-state
                      cells.R.f. magnetron sputter deposition is one approach to
                      coat large substrate areas with LLZ electrolyte. In order to
                      get crack-free, dense and single phase LLZ thin films,
                      deposition parameters need to be adjusted carefully, which
                      is shown by x-ray diffraction (XRD), secondary ion mass
                      spectroscopy (SIMS) and scanning electron microscopy (SEM).
                      In our study conductivities up to 10-6 S/cm are achieved for
                      single phase cubic thin films. Furthermore, LLZ thin films
                      were successfully integrated into all solid state cells,
                      which are also characterized.},
      month         = {Jun},
      date          = {2015-06-14},
      organization  = {20th International Conference on Solid
                       State Ionics, Keystone, CO (USA), 14
                       Jun 2015 - 19 Jun 2015},
      cin          = {IEK-1 / JARA-ENERGY},
      cid          = {I:(DE-Juel1)IEK-1-20101013 / $I:(DE-82)080011_20140620$},
      pnm          = {131 - Electrochemical Storage (POF3-131) / HITEC -
                      Helmholtz Interdisciplinary Doctoral Training in Energy and
                      Climate Research (HITEC) (HITEC-20170406)},
      pid          = {G:(DE-HGF)POF3-131 / G:(DE-Juel1)HITEC-20170406},
      typ          = {PUB:(DE-HGF)1},
      url          = {https://juser.fz-juelich.de/record/255489},
}