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@INPROCEEDINGS{Kappertz:256425,
      author       = {Kappertz, Mark and Schulze-Küppers, Falk and Baumann,
                      Stefan and Sebold, Doris and Guillon, Olivier},
      title        = {{C}hemisches Ätzen von perowskitischen
                      {D}ünnschichtmembranen},
      volume       = {47},
      reportid     = {FZJ-2015-06357},
      isbn         = {978-3-88355-410-5},
      pages        = {289-294},
      year         = {2015},
      comment      = {Sonderbände der praktischen Metallographie},
      booktitle     = {Sonderbände der praktischen
                       Metallographie},
      month         = {Sep},
      date          = {2015-09-16},
      organization  = {49. Metallographie-Tagung, Dresden
                       (Germany), 16 Sep 2015 - 18 Sep 2015},
      cin          = {IEK-1 / JARA-ENERGY},
      cid          = {I:(DE-Juel1)IEK-1-20101013 / $I:(DE-82)080011_20140620$},
      pnm          = {113 - Methods and Concepts for Material Development
                      (POF3-113)},
      pid          = {G:(DE-HGF)POF3-113},
      typ          = {PUB:(DE-HGF)8},
      url          = {https://juser.fz-juelich.de/record/256425},
}