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000025927 084__ $$2WoS$$aMaterials Science, Multidisciplinary
000025927 084__ $$2WoS$$aPhysics, Condensed Matter
000025927 1001_ $$0P:(DE-Juel1)VDB15097$$aRitter, S.$$b0$$uFZJ
000025927 245__ $$a(Pb1-xBax)TiO3 thin films prepared by liquid delivery MOCVD : influence of the process parameters on film formation and electrical properties
000025927 260__ $$aLondon [u.a.]$$bTaylor & Francis$$c2002
000025927 300__ $$a143 - 148
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000025927 440_0 $$02058$$aFerroelectrics$$v268$$x0015-0193
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000025927 520__ $$aPbTiO3 (PTO) and (Pb1-xBax)TiO3 (PBTO) thin films were deposited by means of liquid delivery MOCVD using an Aixtron AIX-200 horizontal reactor with an ultrasonic nebulizer and a non contact vaporizer. The PBTO films grown on Pt-coated Si substrates at different temperatures show a columnar morphology and a random oriented perovskite structure. Film formation and crystal structure were studied for PBTO films deposited on various substrates, e.g. silicon and MgO, which impose different thermal stresses in the polycrystalline films.The films were investigated using XRD, XRF, AFM and SEM. Electrical characterization with respect to ferroelectric hysteresis behavior was performed in correlation to structural properties of the thin films.
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000025927 65320 $$2Author$$aMOCVD
000025927 65320 $$2Author$$aliquid delivery
000025927 65320 $$2Author$$alead titanate
000025927 65320 $$2Author$$a(Pb1-xBax)TiO3
000025927 65320 $$2Author$$aferroelectrics
000025927 65320 $$2Author$$athin films
000025927 7001_ $$0P:(DE-Juel1)VDB3102$$aHoffmann-Eifert, S.$$b1$$uFZJ
000025927 7001_ $$0P:(DE-Juel1)VDB3025$$aBolten, D.$$b2$$uFZJ
000025927 7001_ $$0P:(DE-Juel1)131022$$aWaser, R.$$b3$$uFZJ
000025927 773__ $$0PERI:(DE-600)2042895-9$$a10.1080/00150190211044$$gVol. 268, p. 143 - 148$$p143 - 148$$q268<143 - 148$$tFerroelectrics$$v268$$x0015-0193$$y2002
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000025927 9141_ $$y2002
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000025927 9201_ $$0I:(DE-Juel1)VDB35$$d31.12.2003$$gIFF$$kIFF-EKM$$lElektrokeramische Materialien$$x0
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