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@ARTICLE{Ritter:25927,
      author       = {Ritter, S. and Hoffmann-Eifert, S. and Bolten, D. and
                      Waser, R.},
      title        = {({P}b1-x{B}ax){T}i{O}3 thin films prepared by liquid
                      delivery {MOCVD} : influence of the process parameters on
                      film formation and electrical properties},
      journal      = {Ferroelectrics},
      volume       = {268},
      issn         = {0015-0193},
      address      = {London [u.a.]},
      publisher    = {Taylor $\&$ Francis},
      reportid     = {PreJuSER-25927},
      pages        = {143 - 148},
      year         = {2002},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {PbTiO3 (PTO) and (Pb1-xBax)TiO3 (PBTO) thin films were
                      deposited by means of liquid delivery MOCVD using an Aixtron
                      AIX-200 horizontal reactor with an ultrasonic nebulizer and
                      a non contact vaporizer. The PBTO films grown on Pt-coated
                      Si substrates at different temperatures show a columnar
                      morphology and a random oriented perovskite structure. Film
                      formation and crystal structure were studied for PBTO films
                      deposited on various substrates, e.g. silicon and MgO, which
                      impose different thermal stresses in the polycrystalline
                      films.The films were investigated using XRD, XRF, AFM and
                      SEM. Electrical characterization with respect to
                      ferroelectric hysteresis behavior was performed in
                      correlation to structural properties of the thin films.},
      keywords     = {J (WoSType)},
      cin          = {IFF-EKM},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB35},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Materials Science, Multidisciplinary / Physics, Condensed
                      Matter},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000176861500025},
      doi          = {10.1080/00150190211044},
      url          = {https://juser.fz-juelich.de/record/25927},
}