000025959 001__ 25959
000025959 005__ 20180210142201.0
000025959 0247_ $$2DOI$$a10.1016/S0924-4247(01)00850-0
000025959 0247_ $$2WOS$$aWOS:000176297000093
000025959 037__ $$aPreJuSER-25959
000025959 041__ $$aeng
000025959 082__ $$a530
000025959 084__ $$2WoS$$aEngineering, Electrical & Electronic
000025959 084__ $$2WoS$$aInstruments & Instrumentation
000025959 1001_ $$0P:(DE-HGF)0$$aKueppers, H.$$b0
000025959 245__ $$aPZT thin films for piezoelectric microactuator applications
000025959 260__ $$aAmsterdam [u.a.]$$bElsevier Science$$c2002
000025959 300__ $$a680 - 684
000025959 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article
000025959 3367_ $$2DataCite$$aOutput Types/Journal article
000025959 3367_ $$00$$2EndNote$$aJournal Article
000025959 3367_ $$2BibTeX$$aARTICLE
000025959 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000025959 3367_ $$2DRIVER$$aarticle
000025959 440_0 $$05501$$aSensors and Actuators A$$v97-98$$x0924-4247
000025959 500__ $$aRecord converted from VDB: 12.11.2012
000025959 520__ $$aThe objective of these investigations was the development of a technology for the integration of piezoelectric PZT thin film.,; deposited by chemical solution deposition (CSD) on silicon-based cantilevers for micromirror and microrelay applications. The fabrication process is presented in detail with attention to the PZT thin film. The electrical properties of these thin films have been studied with hysteresis, capacitance-voltage (C-V) and current density-electric field (S-E) measurements. Furthermore, laser interferometry investigations on completed microactuators are depicted. For 390 mum long cantilever structures tip deflections up to 20 mum at an applied voltage of 10 V were measured. The piezoelectric coefficient d(31) was measured to be -12 pC/N. Resonance frequency measurements on a 190 mum long cantilever resulted in a value of 23 kHz. (C) 2002 Elsevier Science B.V. All rights reserved.
000025959 536__ $$0G:(DE-Juel1)FUEK252$$2G:(DE-HGF)$$aMaterialien, Prozesse und Bauelemente für die  Mikro- und Nanoelektronik$$cI01$$x0
000025959 588__ $$aDataset connected to Web of Science
000025959 650_7 $$2WoSType$$aJ
000025959 65320 $$2Author$$aPZT
000025959 65320 $$2Author$$amicroactuator
000025959 65320 $$2Author$$aCSD
000025959 65320 $$2Author$$apiezoelectric coefficient d(31)
000025959 7001_ $$0P:(DE-HGF)0$$aLeuerer, T.$$b1
000025959 7001_ $$0P:(DE-HGF)0$$aSchnakenberg, U.$$b2
000025959 7001_ $$0P:(DE-HGF)0$$aMokwa, W.$$b3
000025959 7001_ $$0P:(DE-HGF)0$$aHoffmann, M.$$b4
000025959 7001_ $$0P:(DE-HGF)0$$aSchneller, T.$$b5
000025959 7001_ $$0P:(DE-HGF)0$$aBoettger, U.$$b6
000025959 7001_ $$0P:(DE-Juel1)131022$$aWaser, R.$$b7$$uFZJ
000025959 773__ $$0PERI:(DE-600)1500729-7$$a10.1016/S0924-4247(01)00850-0$$gVol. 97-98, p. 680 - 684$$p680 - 684$$q97-98<680 - 684$$tSensors and actuators <Lausanne> / A$$v97-98$$x0924-4247$$y2002
000025959 909CO $$ooai:juser.fz-juelich.de:25959$$pVDB
000025959 9131_ $$0G:(DE-Juel1)FUEK252$$bInformation$$kI01$$lInformationstechnologie mit nanoelektronischen Systemen$$vMaterialien, Prozesse und Bauelemente für die  Mikro- und Nanoelektronik$$x0
000025959 9141_ $$y2002
000025959 915__ $$0StatID:(DE-HGF)0010$$aJCR/ISI refereed
000025959 9201_ $$0I:(DE-Juel1)VDB35$$d31.12.2003$$gIFF$$kIFF-EKM$$lElektrokeramische Materialien$$x0
000025959 970__ $$aVDB:(DE-Juel1)17356
000025959 980__ $$aVDB
000025959 980__ $$aConvertedRecord
000025959 980__ $$ajournal
000025959 980__ $$aI:(DE-Juel1)PGI-7-20110106
000025959 980__ $$aUNRESTRICTED
000025959 981__ $$aI:(DE-Juel1)PGI-7-20110106