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@ARTICLE{Kueppers:25959,
      author       = {Kueppers, H. and Leuerer, T. and Schnakenberg, U. and
                      Mokwa, W. and Hoffmann, M. and Schneller, T. and Boettger,
                      U. and Waser, R.},
      title        = {{PZT} thin films for piezoelectric microactuator
                      applications},
      journal      = {Sensors and actuators / A},
      volume       = {97-98},
      issn         = {0924-4247},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science},
      reportid     = {PreJuSER-25959},
      pages        = {680 - 684},
      year         = {2002},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {The objective of these investigations was the development
                      of a technology for the integration of piezoelectric PZT
                      thin film.,; deposited by chemical solution deposition (CSD)
                      on silicon-based cantilevers for micromirror and microrelay
                      applications. The fabrication process is presented in detail
                      with attention to the PZT thin film. The electrical
                      properties of these thin films have been studied with
                      hysteresis, capacitance-voltage (C-V) and current
                      density-electric field (S-E) measurements. Furthermore,
                      laser interferometry investigations on completed
                      microactuators are depicted. For 390 mum long cantilever
                      structures tip deflections up to 20 mum at an applied
                      voltage of 10 V were measured. The piezoelectric coefficient
                      d(31) was measured to be -12 pC/N. Resonance frequency
                      measurements on a 190 mum long cantilever resulted in a
                      value of 23 kHz. (C) 2002 Elsevier Science B.V. All rights
                      reserved.},
      keywords     = {J (WoSType)},
      cin          = {IFF-EKM},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB35},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Engineering, Electrical $\&$ Electronic / Instruments $\&$
                      Instrumentation},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000176297000093},
      doi          = {10.1016/S0924-4247(01)00850-0},
      url          = {https://juser.fz-juelich.de/record/25959},
}