TY  - JOUR
AU  - Kügeler, C.
AU  - Rosezin, R.
AU  - Schneller, T.
AU  - Böttger, U.
AU  - Waser, R.
TI  - Large area piezoelectric actuators using metal foil substrates with Pb(Zr_x, Ti_1-x)O_3 thin films
JO  - Integrated ferroelectrics
VL  - 100
SN  - 1058-4587
CY  - London [u.a.]
PB  - Taylor & Francis
M1  - PreJuSER-2703
SP  - 254
PY  - 2008
N1  - Record converted from VDB: 12.11.2012
AB  - We report on the deposition of Pb(Zrx,Ti1 - x)O3 (PZT) thin films by chemical solution deposition (CSD) on stainless steel foils. The electrical characterization proves good ferroelectric properties with a remnant polarization of 38 C/cm2. Since PZT is also piezoelectric the 35 m and 50 m thick metal foils are used to make piezoelectric actuated cantilever beams of several millimeter lengths. Actuated with 10-30 V a displacement up to 32 m was measured in quasi-static mode. In resonance mode the displacement increases several times at the same driving voltage.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000261765400025
DO  - DOI:10.1080/10584580802543375
UR  - https://juser.fz-juelich.de/record/2703
ER  -