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@ARTICLE{Kgeler:2703,
author = {Kügeler, C. and Rosezin, R. and Schneller, T. and
Böttger, U. and Waser, R.},
title = {{L}arge area piezoelectric actuators using metal foil
substrates with ${P}b({Z}r_x,$ ${T}i_1-x){O}_3$ thin films},
journal = {Integrated ferroelectrics},
volume = {100},
issn = {1058-4587},
address = {London [u.a.]},
publisher = {Taylor $\&$ Francis},
reportid = {PreJuSER-2703},
pages = {254},
year = {2008},
note = {Record converted from VDB: 12.11.2012},
abstract = {We report on the deposition of Pb(Zrx,Ti1 - x)O3 (PZT) thin
films by chemical solution deposition (CSD) on stainless
steel foils. The electrical characterization proves good
ferroelectric properties with a remnant polarization of 38
C/cm2. Since PZT is also piezoelectric the 35 m and 50 m
thick metal foils are used to make piezoelectric actuated
cantilever beams of several millimeter lengths. Actuated
with 10-30 V a displacement up to 32 m was measured in
quasi-static mode. In resonance mode the displacement
increases several times at the same driving voltage.},
keywords = {J (WoSType)},
cin = {IFF-6 / JARA-FIT},
ddc = {620},
cid = {I:(DE-Juel1)VDB786 / $I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Engineering, Electrical $\&$ Electronic / Physics, Applied
/ Physics, Condensed Matter},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000261765400025},
doi = {10.1080/10584580802543375},
url = {https://juser.fz-juelich.de/record/2703},
}