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@INPROCEEDINGS{Uhlenbruck:279019,
      author       = {Uhlenbruck, Sven and Gehrke, Hans-Gregor and Lobe, Sandra
                      and Tsai, Chih-Long and Dellen, Christian and Bünting, Aiko
                      and Bitzer, Martin and Dornseiffer, Jürgen and Van Gestel,
                      Tim and Guillon, Olivier},
      title        = {{M}anufacturing and {P}erformance of solid-state thin-film
                      batteries},
      reportid     = {FZJ-2015-07189},
      year         = {2015},
      abstract     = {The combination of solid ceramic-like electrolytes with
                      inorganic electrodes, thus creating an all solid-state
                      battery, requires a sophisticated co-processing, taking into
                      account the different chemical and thermal stability of the
                      applied materials. Thin-film batteries allow – on the one
                      hand – a detailed analysis of the compatibility of active
                      storage material and the electrolyte because of dense layer
                      morphology (ideal case) and well-defined planar interfaces.
                      On the other hand, thin-film batteries also have the
                      potential for energy storage solutions in applications with
                      short-term or low power consumption. Optionally, a stacking
                      of active thin layers can increase the energy content. In
                      general, the deposition and crystallization of a functional
                      layer for solid-state battery cells requires a heat
                      incidence that can lead to an undesired and detrimental
                      diffusion of constituents into the substrate or into
                      adjacent components, to mechanical stresses and resulting
                      cracks due to different coefficients of thermal expansion,
                      or even to a decomposition of parts of the battery. The
                      purpose of this work is a comparison of different materials,
                      Lithium-oxynitride (LiPON) based and
                      Lithium-Lanthanum-Zirconium-oxide (LLZ) based electrolyte
                      materials, and different thin-film deposition processes (for
                      example physical vapor deposition, spin-coating,
                      dip-coating, ink-jet-printing) that are applied to thin-film
                      solid-state battery cells, and their impact on the
                      microstructure, the inter diffusion and, as a result, on the
                      performance of the cells. Analysis was done, among others,
                      by high-resolution scanning electron microscopy, secondary
                      ion mass spectrometry, nuclear reaction analysis, Rutherford
                      backscattering, electrochemical impedance spectroscopy,
                      galvanostatic charge-discharge measurements and cyclic
                      voltammetry.As an outlook, the economic feasibility of
                      thin-film deposition technologies like physical vapor
                      deposition is discussed.},
      month         = {Oct},
      date          = {2015-10-05},
      organization  = {66th Annual Meeting of the
                       International Society of
                       Electrochemistry, Taipei (Taiwan), 5
                       Oct 2015 - 9 Oct 2015},
      subtyp        = {After Call},
      cin          = {IEK-1 / JARA-ENERGY},
      cid          = {I:(DE-Juel1)IEK-1-20101013 / $I:(DE-82)080011_20140620$},
      pnm          = {131 - Electrochemical Storage (POF3-131) / HITEC -
                      Helmholtz Interdisciplinary Doctoral Training in Energy and
                      Climate Research (HITEC) (HITEC-20170406)},
      pid          = {G:(DE-HGF)POF3-131 / G:(DE-Juel1)HITEC-20170406},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/279019},
}