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@ARTICLE{Becker:27935,
      author       = {Becker, J. S.},
      title        = {{A}pplications of inductively coupled plasma mass
                      spectrometry and laser ablation inductively coupled plasma
                      mass spectrometry in materials science},
      journal      = {Spectrochimica acta / B},
      volume       = {57},
      issn         = {0584-8547},
      address      = {Amsterdam [u.a.]},
      reportid     = {PreJuSER-27935},
      pages        = {1805 - 1820},
      year         = {2002},
      note         = {Record converted from VDB: 12.11.2012},
      cin          = {ZCH},
      ddc          = {540},
      cid          = {I:(DE-Juel1)ZCH-20090406},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000180206700002},
      doi          = {10.1016/S0584-8547(02)00213-6},
      url          = {https://juser.fz-juelich.de/record/27935},
}