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000279701 041__ $$aGerman
000279701 1001_ $$0P:(DE-HGF)0$$aHeffels, Daniel$$b0$$eCorresponding author
000279701 245__ $$aWachstum von Tantalnitridschichten per Metall-MBE$$f - 2015-12-07
000279701 260__ $$c2015
000279701 300__ $$a56 p.
000279701 3367_ $$0PUB:(DE-HGF)2$$2PUB:(DE-HGF)$$aBachelor Thesis$$bbachelor$$mbachelor$$s1450088910_20499
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000279701 502__ $$aFH Aachen, Bachelorarbeit, 2015$$bBA$$cFH Aachen$$d2015
000279701 536__ $$0G:(DE-HGF)POF3-521$$a521 - Controlling Electron Charge-Based Phenomena (POF3-521)$$cPOF3-521$$fPOF III$$x0
000279701 650_7 $$xBachelorarbeit
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