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@INPROCEEDINGS{Finger:279877,
      author       = {Finger, Friedhelm and Carius, Reinhard and Chen, Tao and
                      Ding, Kaining and Heidt, Anna and Köhler, Florian},
      title        = {{A}pplication of {HWCVD} for material development in solar
                      energy research},
      reportid     = {FZJ-2015-07753},
      year         = {2014},
      abstract     = {We will report on the development and application of the
                      Hot Wire Chemical Vapor Deposition technology in solar
                      energy research at the Forschungszentrum Jülich. Over the
                      years we have focused on preparation of microcrystalline
                      silicon and microcrystalline silicon-carbon alloys and we
                      have applied these materials in thin film silicon based
                      solar. We have further applied the HWCVD technology for
                      treatment of interfaces in solar cells and for hydrogen
                      passivation of materials. While so far the focus was on thin
                      film solar cells, recently we have shifted some activities
                      to silicon heterojunction solar cells. Besides we have been
                      interested in developing further the HWCVD system design for
                      more flexibility and dedicated functionality. In our
                      presentation we will show some highlight of our research
                      activities.},
      month         = {Oct},
      date          = {2014-10-13},
      organization  = {8th Hot-Wire Chemical Vapor Deposition
                       Conference, Braunschweig (Germany), 13
                       Oct 2014 - 16 Oct 2014},
      subtyp        = {Invited},
      cin          = {IEK-5},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {121 - Solar cells of the next generation (POF3-121)},
      pid          = {G:(DE-HGF)POF3-121},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/279877},
}