%0 Conference Paper
%A Schierholz, Roland
%A Lacroix, Bertrand
%A Caballero, Jaime
%A Godinho, Vanda
%A Duchamp, Martial
%T Amorphous Silicon-coatings with high amount of closed porosity
%M FZJ-2015-07839
%D 2014
%B 18th International Microscopy Congress Prague
%C 7 Sep 2014 - 12 Sep 2014, Prague (Czech. Republic)
Y2 7 Sep 2014 - 12 Sep 2014
M2 Prague, Czech. Republic
%F PUB:(DE-HGF)24
%9 Poster
%U https://juser.fz-juelich.de/record/280092