TY  - CONF
AU  - Schierholz, Roland
AU  - Lacroix, Bertrand
AU  - Caballero, Jaime
AU  - Godinho, Vanda
AU  - Duchamp, Martial
TI  - Amorphous Silicon-coatings with high amount of closed porosity
M1  - FZJ-2015-07839
PY  - 2014
T2  - 18th International Microscopy Congress Prague
CY  - 7 Sep 2014 - 12 Sep 2014, Prague (Czech. Republic)
Y2  - 7 Sep 2014 - 12 Sep 2014
M2  - Prague, Czech. Republic
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/280092
ER  -