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@ARTICLE{Schierholz:280303,
      author       = {Schierholz, Roland and Lacroix, Bertrand and Godinho, Vanda
                      and Caballero-Hernández, Jaime and Duchamp, Martial and
                      Fernández, Asunción},
      title        = {{STEM}–{EELS} analysis reveals stable high-density {H}e
                      in nanopores of amorphous silicon coatings deposited by
                      magnetron sputtering},
      journal      = {Nanotechnology},
      volume       = {26},
      number       = {7},
      issn         = {1361-6528},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {FZJ-2016-00092},
      pages        = {075703 -},
      year         = {2015},
      abstract     = {A broad interest has been showed recently on the study of
                      nanostructuring of thin films and surfaces obtained by
                      low-energy He plasma treatments and He incorporation via
                      magnetron sputtering. In this paper spatially resolved
                      electron energy-loss spectroscopy in a scanning transmission
                      electron microscope is used to locate and characterize the
                      He state in nanoporous amorphous silicon coatings deposited
                      by magnetron sputtering. A dedicated MATLAB program was
                      developed to quantify the helium density inside individual
                      pores based on the energy position shift or peak intensity
                      of the He K-edge. A good agreement was observed between the
                      high density (~35–60 at nm−3) and pressure (0.3–1.0
                      GPa) values obtained in nanoscale analysis and the values
                      derived from macroscopic measurements (the composition
                      obtained by proton backscattering spectroscopy coupled to
                      the macroscopic porosity estimated from ellipsometry). This
                      work provides new insights into these novel porous coatings,
                      providing evidence of high-density He located inside the
                      pores and validating the methodology applied here to
                      characterize the formation of pores filled with the helium
                      process gas during deposition. A similar stabilization of
                      condensed He bubbles has been previously demonstrated by
                      high-energy He ion implantation in metals and is newly
                      demonstrated here using a widely employed methodology,
                      magnetron sputtering, for achieving coatings with a high
                      density of homogeneously distributed pores and He storage
                      capacities as high as 21 $at\%.$},
      cin          = {PGI-5 / IEK-9},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-5-20110106 / I:(DE-Juel1)IEK-9-20110218},
      pnm          = {143 - Controlling Configuration-Based Phenomena (POF3-143)},
      pid          = {G:(DE-HGF)POF3-143},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000349244400018},
      doi          = {10.1088/0957-4484/26/7/075703},
      url          = {https://juser.fz-juelich.de/record/280303},
}