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| Hauptseite > Publikationsdatenbank > Mechanism for crystalline Si surface passivation by the combination of SiO$_{2}$ tunnel oxide and µc-SiC:H thin film > print |
| Hauptseite > Publikationsdatenbank > Mechanism for crystalline Si surface passivation by the combination of SiO$_{2}$ tunnel oxide and µc-SiC:H thin film > print |
| 001 | 280639 | ||
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| 024 | 7 | _ | |a 10.1002/pssr.201510376 |2 doi |
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| 100 | 1 | _ | |a Ding, Kaining |0 P:(DE-Juel1)130233 |b 0 |e Corresponding author |
| 245 | _ | _ | |a Mechanism for crystalline Si surface passivation by the combination of SiO$_{2}$ tunnel oxide and µc-SiC:H thin film |
| 260 | _ | _ | |a Weinheim |c 2016 |b Wiley-VCH |
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| 520 | _ | _ | |a This work demonstrates that the combination of a wet-chemically grown SiO2 tunnel oxide with a highly-doped microcrystalline silicon carbide layer grown by hot-wire chemical vapor deposition yields an excellent surface passivation for phosphorous-doped crystalline silicon (c-Si) wafers. We find effective minority carrier lifetimes of well above 6 ms by introducing this stack. We investigated its c-Si surface passivation mechanism in a systematic study combined with the comparison to a phosphorous-doped polycrystalline-Si (pc-Si)/SiO2 stack. In both cases, field effect passivation by the n-doping of either the µc-SiC:H or the pc-Si is effective. Hydrogen passivation during µc-SiC:H growth plays an important role for the µc-SiC:H/SiO2 combination, whereas phosphorous in-diffusion into the SiO2 and the c-Si is operative for the surface passivation via the Pc-Si/SiO2 stack. The high transparency and conductivity of the µc-SiC:H layer, a low thermal budget and number of processes needed to form the stack, and the excellent c-Si surface passivation quality are advantageous features of µc-SiC:H/SiO2 that can be beneficial for c-Si solar cells. |
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| 773 | _ | _ | |a 10.1002/pssr.201510376 |g Vol. 9999, no. 9999, p. n/a - n/a |0 PERI:(DE-600)2259465-6 |n 3 |p 233 – 236 |t Physica status solidi / Rapid research letters |v 10 |y 2016 |x 1862-6254 |
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