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@PHDTHESIS{Spiegelberg:280693,
author = {Spiegelberg, Richard},
title = {{E}ntwicklung einer leistungsfähigen
{D}etektions-{E}lektronik für
die{M}ultispitzen-{R}astersondenmikroskopie zur
{F}ehleranalyse an integrierten {S}chaltungen},
school = {RWTH Aachen},
type = {Dr.},
reportid = {FZJ-2016-00450},
pages = {180},
year = {2015},
note = {RWTH Aachen, Diss., 2015},
cin = {PGI-3},
cid = {I:(DE-Juel1)PGI-3-20110106},
pnm = {141 - Controlling Electron Charge-Based Phenomena
(POF3-141)},
pid = {G:(DE-HGF)POF3-141},
typ = {PUB:(DE-HGF)11},
url = {https://juser.fz-juelich.de/record/280693},
}