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@ARTICLE{Richter:280706,
author = {Richter, Alexei and Zhao, Lei and Finger, Friedhelm and
Ding, Kaining},
title = {{N}ano-composite microstructure model for the
classification of hydrogenated nanocrystalline silicon oxide
thin films},
journal = {Surface and coatings technology},
volume = {295},
issn = {0257-8972},
address = {Amsterdam [u.a.]},
publisher = {Elsevier Science},
reportid = {FZJ-2016-00463},
pages = {119–124},
year = {2016},
abstract = {The unique microstructure of nanocrystalline silicon oxide
(nc-SiOX:H) thin films results in excellent optoelectronic
properties that can be tuned in a wide range to fulfill the
requirements of the specific application. For photovoltaic
applications, this material is used as doped layers in
silicon heterojunction solar cells and intermediate
reflectors in multijunction thin-film solar cell. In this
paper, we present a microstructure model based on a large
number of n- and p-doped nc-SiOX:H films that were deposited
under various deposition pressures, plasma powers, plasma
frequencies and gas mixtures. This model is meant to provide
guidelines for the systematic classification of the complex
material system nc-SiOX:H by establishing a link between the
structure of the deposited films and the optoelectronic
performance of nc-SiOX:H. Based on this model, the
deposition of nc-SiOX:H films can be divided into four
characteristic regions: (i) fully amorphous region, (ii)
onset of nc-Si formation, (iii) oxygen and nc-Si enrichment
region, and (iv) deterioration of nc-Si. According to our
microstructure model, an optimal phase composition with
respect to the optoelectronic performance can be achieved
with a high amount of highly conductive nc-Si percolation
paths embedded in an oxygen rich a-SiOX:H matrix.},
cin = {IEK-5},
ddc = {620},
cid = {I:(DE-Juel1)IEK-5-20101013},
pnm = {121 - Solar cells of the next generation (POF3-121) / HITEC
- Helmholtz Interdisciplinary Doctoral Training in Energy
and Climate Research (HITEC) (HITEC-20170406)},
pid = {G:(DE-HGF)POF3-121 / G:(DE-Juel1)HITEC-20170406},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000376834700018},
doi = {10.1016/j.surfcoat.2015.09.016},
url = {https://juser.fz-juelich.de/record/280706},
}