%0 Conference Paper
%A Hardtdegen, Alexander
%A Hoffmann-Eifert, Susanne
%T Resistive switching in HfO2 thin films grown by plasma-assisted ALD
%M FZJ-2016-00666
%D 2015
%B DPG Tagung
%C 15 Mar 2015 - 20 Mar 2015, Berlin (Germany)
Y2 15 Mar 2015 - 20 Mar 2015
M2 Berlin, Germany
%F PUB:(DE-HGF)24
%9 Poster
%U https://juser.fz-juelich.de/record/280955