TY  - CONF
AU  - Hardtdegen, Alexander
AU  - Hoffmann-Eifert, Susanne
TI  - Resistive switching in HfO2 thin films grown by plasma-assisted ALD
M1  - FZJ-2016-00666
PY  - 2015
T2  - DPG Tagung
CY  - 15 Mar 2015 - 20 Mar 2015, Berlin (Germany)
Y2  - 15 Mar 2015 - 20 Mar 2015
M2  - Berlin, Germany
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/280955
ER  -