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TY - CONF AU - Andrä, Michael AU - Bäumer, Christoph AU - Xu, Chengcheng AU - Dittmann, Regina AU - Waser, R. TI - Influence of the local oxygen vacancy concentration on the piezoresponse of strontium titanate thin films M1 - FZJ-2016-00972 PY - 2015 T2 - Nanoelectronics Days CY - 27 Apr 2015 - 30 Apr 2015, Jülich (Germany) Y2 - 27 Apr 2015 - 30 Apr 2015 M2 - Jülich, Germany LB - PUB:(DE-HGF)24 UR - https://juser.fz-juelich.de/record/281273 ER -