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@ARTICLE{Keuter:281762,
      author       = {Keuter, Thomas and Mauer, Georg and Vondahlen, Frank and
                      Iskandar, Riza and Menzler, Norbert H. and Vassen, Robert},
      title        = {{A}tomic-layer-controlled deposition of
                      {TEMAZ}/{O}2–{Z}r{O}2 oxidation resistance inner surface
                      coatings for solid oxide fuel cells},
      journal      = {Surface and coatings technology},
      volume       = {288},
      issn         = {0257-8972},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science},
      reportid     = {FZJ-2016-01444},
      pages        = {211 - 220},
      year         = {2016},
      abstract     = {Solid oxide fuel cells (SOFCs) directly convert the
                      chemical energy of fuels into electrical energy with high
                      efficiency. Under certain conditions oxygen can diffuse to
                      the Ni/8 $mol\%$ Y2O3-doped ZrO2 substrate of
                      anode-supported SOFCs, then the nickel re-oxidizes, leading
                      to cracks in the electrolyte and cell failure thus limiting
                      the durability of SOFCs. In order to improve the stability
                      of SOFCs with respect to oxidation, the inner surface of the
                      porous substrate is coated with a ZrO2 oxidation resistance
                      layer using atomic layer deposition (ALD) with the
                      precursors tetrakis(ethylmethylamino)zirconium (TEMAZ) and
                      molecular oxygen. This TEMAZ/O2–ZrO2 ALD process has not
                      yet been reported in the literature and hence, the
                      development of the process is described in this paper. The
                      inner surface of the porous substrate is coated with ZrO2
                      and the film thickness is compared with theoretical
                      predictions, verifying the ALD model. Furthermore, the
                      coating depth can be estimated using a simple analytical
                      equation. The ALD ZrO2 film protects the nickel in the
                      substrate against oxidation for at least 17
                      re-oxidation/re-reduction cycles. The ZrO2 inner surface
                      coating is a highly promising candidate for enhancing the
                      resistance of SOFCs to re-oxidation because of the excellent
                      oxidation resistance and good cycling stability of the
                      film.},
      cin          = {IEK-1},
      ddc          = {620},
      cid          = {I:(DE-Juel1)IEK-1-20101013},
      pnm          = {135 - Fuel Cells (POF3-135) / SOFC - Solid Oxide Fuel Cell
                      (SOFC-20140602) / HITEC - Helmholtz Interdisciplinary
                      Doctoral Training in Energy and Climate Research (HITEC)
                      (HITEC-20170406)},
      pid          = {G:(DE-HGF)POF3-135 / G:(DE-Juel1)SOFC-20140602 /
                      G:(DE-Juel1)HITEC-20170406},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000371549200025},
      doi          = {10.1016/j.surfcoat.2016.01.026},
      url          = {https://juser.fz-juelich.de/record/281762},
}