%0 Journal Article
%A Lobe, Sandra
%A Dellen, Christian
%A Finsterbusch, M.
%A Gehrke, H.-G.
%A Sebold, D.
%A Tsai, C.-L.
%A Uhlenbruck, S.
%A Guillon, Olivier
%T Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries
%J Journal of power sources
%V 307
%@ 0378-7753
%C New York, NY [u.a.]
%I Elsevier
%M FZJ-2016-01871
%P 684 - 689
%D 2016
%X Thin film batteries based on solid electrolytes having a garnet-structure like Li7La3Zr2O12 (LLZ) are considered as one option for safer batteries with increased power density. In this work we show the deposition of Ta- and Al-substituted LLZ thin films on stainless steel substrates by r.f. magnetron sputtering. The thin films were characterized by XRD, SEM and time-of-flight-secondary ion mass spectrometry (ToF-SIMS) to determine crystal structure, morphology and element distribution. The substrate temperature was identified to be one important parameter for the formation of cubic garnet-structured LLZ thin films. LLZ formation starts at around 650 °C. Single phase cubic thin films were obtained at substrate temperatures of 700 °C and higher. At these temperatures an interlayer is formed. Combination of SEM, ToF-SIMS and XRD indicated that this layer consists of γ-LiAlO2. The combined total ionic conductivity of the γ-LiAlO2 interlayer and the LLZ thin film (perpendicular to the plane) was determined to be 2.0 × 10−9 S cm−1 for the sample deposited at 700 °C. In-plane measurements showed a room temperature conductivity of 1.2 × 10−4 S cm−1 with an activation energy of 0.47 eV for the LLZ thin film.
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000370884000083
%R 10.1016/j.jpowsour.2015.12.054
%U https://juser.fz-juelich.de/record/283555