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000283555 1001_ $$0P:(DE-Juel1)161444$$aLobe, Sandra$$b0$$eCorresponding author
000283555 245__ $$aRadio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries
000283555 260__ $$aNew York, NY [u.a.]$$bElsevier$$c2016
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000283555 520__ $$aThin film batteries based on solid electrolytes having a garnet-structure like Li7La3Zr2O12 (LLZ) are considered as one option for safer batteries with increased power density. In this work we show the deposition of Ta- and Al-substituted LLZ thin films on stainless steel substrates by r.f. magnetron sputtering. The thin films were characterized by XRD, SEM and time-of-flight-secondary ion mass spectrometry (ToF-SIMS) to determine crystal structure, morphology and element distribution. The substrate temperature was identified to be one important parameter for the formation of cubic garnet-structured LLZ thin films. LLZ formation starts at around 650 °C. Single phase cubic thin films were obtained at substrate temperatures of 700 °C and higher. At these temperatures an interlayer is formed. Combination of SEM, ToF-SIMS and XRD indicated that this layer consists of γ-LiAlO2. The combined total ionic conductivity of the γ-LiAlO2 interlayer and the LLZ thin film (perpendicular to the plane) was determined to be 2.0 × 10−9 S cm−1 for the sample deposited at 700 °C. In-plane measurements showed a room temperature conductivity of 1.2 × 10−4 S cm−1 with an activation energy of 0.47 eV for the LLZ thin film.
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000283555 7001_ $$0P:(DE-Juel1)158085$$aDellen, Christian$$b1
000283555 7001_ $$0P:(DE-Juel1)145623$$aFinsterbusch, M.$$b2$$ufzj
000283555 7001_ $$0P:(DE-Juel1)162280$$aGehrke, H.-G.$$b3$$ufzj
000283555 7001_ $$0P:(DE-Juel1)129662$$aSebold, D.$$b4$$ufzj
000283555 7001_ $$0P:(DE-Juel1)156244$$aTsai, C.-L.$$b5$$ufzj
000283555 7001_ $$0P:(DE-Juel1)129580$$aUhlenbruck, S.$$b6$$ufzj
000283555 7001_ $$0P:(DE-Juel1)161591$$aGuillon, Olivier$$b7
000283555 773__ $$0PERI:(DE-600)1491915-1$$a10.1016/j.jpowsour.2015.12.054$$gVol. 307, p. 684 - 689$$p684 - 689$$tJournal of power sources$$v307$$x0378-7753$$y2016
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