%0 Journal Article
%A Grossmann, M.
%A Lohse, O.
%A Bolten, D.
%A Böttger, U.
%A Waser, R.
%A Tiedke, S.
%A Schmitz, T.
%A Kall, U.
%A Kastner, M.
%A Schindler, G.
%A Hartner, W.
%T Influence of the measurement parameters on the reliability of ferroelectric thin films
%J Integrated ferroelectrics
%V 32
%@ 1058-4587
%C London [u.a.]
%I Taylor & Francis
%M PreJuSER-29411
%P 1 - 9
%D 2001
%Z Record converted from VDB: 12.11.2012
%X The fatigue behavior of PZT thin films was investigated. The fatigue excitation signal was changed with respect to the shape, the amplitude, and the frequency of the signal. It is shown that the fatigue excitation signal has a strong influence on the fatigue behavior of the films. Additionally, electrical characterization of a single 1 mum(2) SBT capacitor is reported.
%K J (WoSType)
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000167524400002
%U https://juser.fz-juelich.de/record/29411