%0 Journal Article
%A Fitsilis, F.
%A Regnery, S.
%A Ehrhart, P.
%A Waser, R.
%A Schienle, F.
%A Schumacher, M.
%A Dauelsberg, M.
%A Strzyzewski, P.
%A Juergensen, H.
%T BST thin films grown in a multi-wafer MOCVD reactor
%J Journal of the European Ceramic Society
%V 21
%@ 0955-2219
%C Amsterdam [u.a.]
%I Elsevier Science
%M PreJuSER-29437
%P 1547 - 1551
%D 2001
%Z Record converted from VDB: 12.11.2012
%F PUB:(DE-HGF)16
%9 Journal Article
%U https://juser.fz-juelich.de/record/29437