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@ARTICLE{Fitsilis:29437,
      author       = {Fitsilis, F. and Regnery, S. and Ehrhart, P. and Waser, R.
                      and Schienle, F. and Schumacher, M. and Dauelsberg, M. and
                      Strzyzewski, P. and Juergensen, H.},
      title        = {{BST} thin films grown in a multi-wafer {MOCVD} reactor},
      journal      = {Journal of the European Ceramic Society},
      volume       = {21},
      issn         = {0955-2219},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science},
      reportid     = {PreJuSER-29437},
      pages        = {1547 - 1551},
      year         = {2001},
      note         = {Record converted from VDB: 12.11.2012},
      cin          = {IFF-EKM},
      ddc          = {660},
      cid          = {I:(DE-Juel1)VDB35},
      pnm          = {Festkörperforschung für die Informationstechnik},
      pid          = {G:(DE-Juel1)FUEK54},
      typ          = {PUB:(DE-HGF)16},
      url          = {https://juser.fz-juelich.de/record/29437},
}