% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@ARTICLE{Hartner:31595,
      author       = {Hartner, W. and Bosk, P. and Schindler, G. and Bachhofer,
                      H. and Mört, M. and Wendt, H. and Mikolajick, D. A. B. and
                      Dehm, C. and Schroeder, H. and Waser, R.},
      title        = {{S}r{B}i 2{T}a 2{O} 9 ferroelectric thin film capacitors:
                      degradation in a hydrogen ambient},
      journal      = {Applied physics / A},
      volume       = {77},
      issn         = {0947-8396},
      address      = {Berlin},
      publisher    = {Springer},
      reportid     = {PreJuSER-31595},
      pages        = {571 - 579},
      year         = {2003},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {The effects of annealing in forming gas $5\%$ hydrogen,
                      $95\%$ nitrogen; FGA) are studied on spin-coated SrBi2Ta2O9
                      (SBT) thin films. SBT films on a platinum bottom electrode
                      are characterized with and without a platinum top electrode.
                      Films are characterized by residual stress measurements,
                      scanning electron microscopy (SEM), Auger electron
                      spectroscopy (AES), high-temperature X-ray diffraction
                      (HT-XRD) and secondary ion mass spectrometry (SIMS). To
                      determine the degree of strain, lattice constants of Pt are
                      measured by X-ray diffraction (XRD). HT-XRD of blanket
                      SBT/Pt/Ti films in forming gas revealed that the
                      bismuth-layered perovskite structure of SBT is stable up to
                      approximately 500 degreesC. After formation of an
                      intermediate phase between 550 degreesC and 700 degreesC,
                      SBT changes its structure to an amorphous phase. SIMS
                      analysis of Pt/SBT/Pt samples annealed in deuterated forming
                      gas $(5\%$ D-2, $95\%$ N-2) showed that hydrogen accumulates
                      in the SBT layer and at the platinum interfaces next to the
                      SBT. After FGA of blanket SBT films, tall platinum-bismuth
                      whiskers are seen on the SBT surface. It is confirmed that
                      these whiskers originate from the platinum bottom electrode
                      and grow through the SBT layer. FGA of the entire
                      Pt/SBT/Pt/Ti stack shows two different results. For the
                      samples with a high-temperature annealing (HTA) step in
                      oxygen after top electrode patterning, peeling of the top
                      electrode is observed after FGA. For the samples without a
                      HTA step, no peeling is observed after FGA. The residual
                      stress at room temperature is measured for blanket platinum
                      wafers deposited at different temperatures. It is found that
                      an increase in tensile stress caused by the HTA step in
                      oxygen is followed by a decrease in stress caused by the
                      hydrogen in the forming gas. Without HTA, however, an
                      increase of stress is observed after FGA.},
      keywords     = {J (WoSType)},
      cin          = {IFF-EKM},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB35},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Materials Science, Multidisciplinary / Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000184296000037},
      doi          = {10.1007/s00339-002-1500-y},
      url          = {https://juser.fz-juelich.de/record/31595},
}