%0 Journal Article
%A Hoffmann, M.
%A Leuerer, T.
%A Liedtke, R.
%A Böttger, U.
%A Mokwa, W.
%A Waser, R.
%T Integration of piezoelectric PZT thin films with internal electrodes into an actuator structure for MEMS application
%J Integrated ferroelectrics
%V 50
%@ 1058-4587
%C London [u.a.]
%I Taylor & Francis
%M PreJuSER-31999
%P 21 - 32
%D 2002
%Z Record converted from VDB: 12.11.2012
%F PUB:(DE-HGF)16
%9 Journal Article
%U https://juser.fz-juelich.de/record/31999