TY  - JOUR
AU  - Hoffmann, M.
AU  - Leuerer, T.
AU  - Liedtke, R.
AU  - Böttger, U.
AU  - Mokwa, W.
AU  - Waser, R.
TI  - Integration of piezoelectric PZT thin films with internal electrodes into an actuator structure for MEMS application
JO  - Integrated ferroelectrics
VL  - 50
SN  - 1058-4587
CY  - London [u.a.]
PB  - Taylor & Francis
M1  - PreJuSER-31999
SP  - 21 - 32
PY  - 2002
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)16
UR  - https://juser.fz-juelich.de/record/31999
ER  -