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@ARTICLE{Hoffmann:31999,
      author       = {Hoffmann, M. and Leuerer, T. and Liedtke, R. and Böttger,
                      U. and Mokwa, W. and Waser, R.},
      title        = {{I}ntegration of piezoelectric {PZT} thin films with
                      internal electrodes into an actuator structure for {MEMS}
                      application},
      journal      = {Integrated ferroelectrics},
      volume       = {50},
      issn         = {1058-4587},
      address      = {London [u.a.]},
      publisher    = {Taylor $\&$ Francis},
      reportid     = {PreJuSER-31999},
      pages        = {21 - 32},
      year         = {2002},
      note         = {Record converted from VDB: 12.11.2012},
      cin          = {IFF-EKM},
      ddc          = {620},
      cid          = {I:(DE-Juel1)VDB35},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      typ          = {PUB:(DE-HGF)16},
      url          = {https://juser.fz-juelich.de/record/31999},
}