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@ARTICLE{Gerber:32000,
      author       = {Gerber, P. and Roelofs, A. and Lohse, O. and Kügeler, C.
                      and Tiedke, S. and Böttger, U. and Waser, R.},
      title        = {{S}hort-time piezoelectric measurements in ferroelectric
                      thin films using a double-beam laser interferometer},
      journal      = {Review of scientific instruments},
      volume       = {74},
      issn         = {0034-6748},
      address      = {[S.l.]},
      publisher    = {American Institute of Physics},
      reportid     = {PreJuSER-32000},
      pages        = {2613 - 2615},
      year         = {2003},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {An evolution of the double-beam laser interferometer used
                      for piezoelectric measurements in ferroelectric thin films
                      is reported. Measuring the d(33) hysteresis of a
                      ferroelectric material using lock-in technique with large
                      time constants requires a varying bias field to be applied
                      to the sample over a long period of time. This long-term
                      application leads to electrical stress during the
                      measurement. We present a measurement technique using a
                      different source for the applied field and a varied method
                      for averaging the interferometric response. The measurement
                      time for a complete d(33) hysteresis will be shortened down
                      to several seconds. Also, the cycle frequency becomes
                      comparable to electrical hysteresis measurements.
                      Experimental results on quartz and Pb(Zr-(X),Ti(1-X))O-3 are
                      given to demonstrate the capabilities of the interferometer
                      and the new measurement method. (C) 2003 American Institute
                      of Physics.},
      keywords     = {J (WoSType)},
      cin          = {IFF-EKM},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB35},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Instruments $\&$ Instrumentation / Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000181829000053},
      doi          = {10.1063/1.1544415},
      url          = {https://juser.fz-juelich.de/record/32000},
}