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@ARTICLE{Regnery:32025,
      author       = {Regnery, S. and Ehrhart, P. and Fitsilis, F. and Waser, R.
                      and Ding, Y. and Jia, C. L. and Schumacher, M. and Schienle,
                      F.},
      title        = {({B}a,{S}r){T}i{O}3 thin film growth in a batch processing
                      {MOCVD} reactor},
      journal      = {Journal of the European Ceramic Society},
      volume       = {24},
      issn         = {0955-2219},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science},
      reportid     = {PreJuSER-32025},
      pages        = {271-276},
      year         = {2003},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {Thin films of different compositions within the
                      (Ba-x,Sr1-x)TiO3 solid solution series were deposited in a
                      planetary multi-wafer MOCVD reactor using different
                      solutions of Sr(thd)(2), Ba(thd)(2) and
                      Ti(O-i-Pr)(2)(thd)(2) precursors. Structural and electrical
                      properties of Pt/BST/Pt MIM structures are presented. On the
                      base of film thickness series ranging from 10 to 150 nm the
                      electrical permittivity is discussed within the dead layer
                      model. The performance of two different liquid precursor
                      delivery systems, characterized by flash evaporation and
                      liquid injection, respectively, are compared for the example
                      of different SrTiO3 films. Finally, the growth of SrTiO3 on
                      Pt(111) is compared with the growth on Si(100) and the
                      electrical characteristics of the Pt/STO/Si MIS structures
                      are discussed. (C) 2003 Elsevier Ltd. All rights reserved.},
      keywords     = {J (WoSType)},
      cin          = {IFF-IEM / IFF-IMF / CNI},
      ddc          = {660},
      cid          = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB37 /
                      I:(DE-Juel1)VDB381},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Materials Science, Ceramics},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000186348500017},
      doi          = {10.1016/S0955-2219(03)00235-8},
      url          = {https://juser.fz-juelich.de/record/32025},
}