001     32044
005     20180210123435.0
024 7 _ |2 DOI
|a 10.1080/10584580190044371
024 7 _ |2 WOS
|a WOS:000179828900026
037 _ _ |a PreJuSER-32044
041 _ _ |a eng
082 _ _ |a 620
084 _ _ |2 WoS
|a Engineering, Electrical & Electronic
084 _ _ |2 WoS
|a Physics, Applied
084 _ _ |2 WoS
|a Physics, Condensed Matter
100 1 _ |a Schmitz, S.
|b 0
|u FZJ
|0 P:(DE-Juel1)VDB15087
245 _ _ |a Leakage current measurements of STO and BST thin films interpreted by the 'dead' layer model
260 _ _ |a London [u.a.]
|b Taylor & Francis
|c 2002
300 _ _ |a 233
336 7 _ |a Journal Article
|0 PUB:(DE-HGF)16
|2 PUB:(DE-HGF)
336 7 _ |a Output Types/Journal article
|2 DataCite
336 7 _ |a Journal Article
|0 0
|2 EndNote
336 7 _ |a ARTICLE
|2 BibTeX
336 7 _ |a JOURNAL_ARTICLE
|2 ORCID
336 7 _ |a article
|2 DRIVER
440 _ 0 |a Integrated Ferroelectrics
|x 1058-4587
|0 2659
|v 46
500 _ _ |a Record converted from VDB: 12.11.2012
520 _ _ |a Electrical properties of Strontium-Titanate (STO) and Barium-Strontium-Titanate (BST) thin films capacitors were investigated. The STO films were fabricated by chemical solution deposition (CSD) with thickness between 50 and 150 nm, while the BST films were deposited by metal organic chemical vapor deposition (MOCVD) with thickness between 20 and 110 nm. All films were grown on platinized and oxidized silicon wafers. As top electrodes platinum (Pt) was deposited on top of the ceramic film by sputtering. The electrode size varied between 8*10(-3) to 1 mm(2) . The leakage current measurements were performed at different temperatures ranging from 15 to 200degreesC and the applied voltage varied between 0 and +/-4 V. Capacitance was measured at RT up to +/-3 V bias at 1 kHz and 50 mV oscillation voltage.The main results are: The effective barrier heights extracted from the temperature dependence of leakage current are about 1.35 eV for STO and 0.94 eV for BST for the temperature region >100degreesC. The field dependencies of the leakage current show almost perfect linear behavior in a "Schottky" plot for BST while STO reveals 2 separated Schottky regions. The permittivity extracted from the field dependence using the simple thermionic emission model with Schottky lowering results in rather improbable values of the effective Richardson constant A(*) and unphysical values of the relative optical permittivity, epsilon(r,opt) <1.The use of a modified model with low permittivity interface layers ("dead layers"), as suggested by the thickness dependence of the inverse capacitance, solved these difficulties. The parameters extracted from fits of this model are discussed.
536 _ _ |a Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
|c I01
|2 G:(DE-HGF)
|0 G:(DE-Juel1)FUEK252
|x 0
588 _ _ |a Dataset connected to Web of Science
650 _ 7 |a J
|2 WoSType
653 2 0 |2 Author
|a leakage current
653 2 0 |2 Author
|a SrTiO3
653 2 0 |2 Author
|a (Ba,Sr)TiO3
653 2 0 |2 Author
|a dead layers
653 2 0 |2 Author
|a Schottky contact
653 2 0 |2 Author
|a Schottky barrier height
653 2 0 |2 Author
|a capacitance
700 1 _ |a Schroeder, H.
|b 1
|u FZJ
|0 P:(DE-Juel1)VDB3130
773 _ _ |a 10.1080/10584580190044371
|g Vol. 46, p. 233
|p 233
|q 46<233
|0 PERI:(DE-600)2037916-X
|t Integrated ferroelectrics
|v 46
|y 2002
|x 1058-4587
909 C O |o oai:juser.fz-juelich.de:32044
|p VDB
913 1 _ |k I01
|v Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
|l Informationstechnologie mit nanoelektronischen Systemen
|b Information
|0 G:(DE-Juel1)FUEK252
|x 0
914 1 _ |a Nachtrag
|y 2002
915 _ _ |0 StatID:(DE-HGF)0010
|a JCR/ISI refereed
920 1 _ |k IFF-EKM
|l Elektrokeramische Materialien
|d 31.12.2003
|g IFF
|0 I:(DE-Juel1)VDB35
|x 0
970 _ _ |a VDB:(DE-Juel1)33506
980 _ _ |a VDB
980 _ _ |a ConvertedRecord
980 _ _ |a journal
980 _ _ |a I:(DE-Juel1)PGI-7-20110106
980 _ _ |a UNRESTRICTED
981 _ _ |a I:(DE-Juel1)PGI-7-20110106


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