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@ARTICLE{Meier:3365,
      author       = {Meier, M. and Schindler, C. and Gilles, S. and Rosezin, R.
                      and Rüdiger, A. and Kügeler, C. and Waser, R.},
      title        = {{A} nonvolatile memory with resistively switching
                      methyl-silsesquioxane},
      journal      = {IEEE Electron Device Letters},
      volume       = {30},
      issn         = {0741-3106},
      address      = {New York, NY},
      publisher    = {IEEE},
      reportid     = {PreJuSER-3365},
      pages        = {8 - 10},
      year         = {2009},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {Crossbar structures with integrated methyl-silsesquioxane
                      (MSQ) were fabricated by UV nanoimprint lithography. The
                      sandwiched MSQ film was used for the planarization of the
                      bottom electrodes' interface as well as for the realization
                      of functional resistively switching crosspoint junctions.
                      With our process, future nonvolatile crossbar memories with
                      stacking and, thus, high integration density potential can
                      be realized. Using MSQ as functional material additionally
                      indicates an attractive opportunity because it is highly
                      CMOS compatible. By programming word registers with
                      different bit patterns, we demonstrate the potential of this
                      crossbar architecture for future memory and logic
                      applications.},
      keywords     = {J (WoSType)},
      cin          = {IBN-2 / IFF-6 / JARA-FIT},
      ddc          = {620},
      cid          = {I:(DE-Juel1)IBN-2-20090406 / I:(DE-Juel1)VDB786 /
                      $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      shelfmark    = {Engineering, Electrical $\&$ Electronic},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000262364200004},
      doi          = {10.1109/LED.2008.2008108},
      url          = {https://juser.fz-juelich.de/record/3365},
}