TY  - JOUR
AU  - Stiebig, H.
AU  - Büchner, H.
AU  - Bunte, E.
AU  - Mandryka, V.
AU  - Knipp, D.
AU  - Jäger, G.
TI  - Standing-wave interferometer
JO  - Applied physics letters
VL  - 83
SN  - 0003-6951
CY  - Melville, NY
PB  - American Institute of Physics
M1  - PreJuSER-33992
SP  - 12
PY  - 2003
N1  - Record converted from VDB: 12.11.2012
AB  - An interferometric position sensor was developed using the concept of sampling a standing wave. Interference of a standing wave created in front of a plane mirror can be detected by thin, partly transparent sensors based on amorphous silicon. The optical thickness of the absorption layer is thinner than the wavelength lambda of the incident light. Detection of minima and maxima of the standing wave can be used to determine the relative displacement of the plane mirror and the detector. For determination of bidirectional fringe counting, two detectors with a certain phase shift were introduced into the standing wave. An integrated solution of two stacked n-i-p diodes and a phase shifter will be presented. The operation principle of the device will be demonstrated by measured Lissajous figures. (C) 2003 American Institute of Physics.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000183877800005
DO  - DOI:10.1063/1.1590732
UR  - https://juser.fz-juelich.de/record/33992
ER  -