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@ARTICLE{Stiebig:33992,
      author       = {Stiebig, H. and Büchner, H. and Bunte, E. and Mandryka, V.
                      and Knipp, D. and Jäger, G.},
      title        = {{S}tanding-wave interferometer},
      journal      = {Applied physics letters},
      volume       = {83},
      issn         = {0003-6951},
      address      = {Melville, NY},
      publisher    = {American Institute of Physics},
      reportid     = {PreJuSER-33992},
      pages        = {12},
      year         = {2003},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {An interferometric position sensor was developed using the
                      concept of sampling a standing wave. Interference of a
                      standing wave created in front of a plane mirror can be
                      detected by thin, partly transparent sensors based on
                      amorphous silicon. The optical thickness of the absorption
                      layer is thinner than the wavelength lambda of the incident
                      light. Detection of minima and maxima of the standing wave
                      can be used to determine the relative displacement of the
                      plane mirror and the detector. For determination of
                      bidirectional fringe counting, two detectors with a certain
                      phase shift were introduced into the standing wave. An
                      integrated solution of two stacked n-i-p diodes and a phase
                      shifter will be presented. The operation principle of the
                      device will be demonstrated by measured Lissajous figures.
                      (C) 2003 American Institute of Physics.},
      keywords     = {J (WoSType)},
      cin          = {IPV},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB46},
      pnm          = {Photovoltaik},
      pid          = {G:(DE-Juel1)FUEK247},
      shelfmark    = {Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000183877800005},
      doi          = {10.1063/1.1590732},
      url          = {https://juser.fz-juelich.de/record/33992},
}