%0 Journal Article
%A Karthäuser, S.
%A Vasco Matias, E.
%A Dittmann, R.
%A Waser, R.
%T Fabrication of arrays of SrZrO3 nanowires by pulsed laser deposition
%J Nanotechnology
%V 15
%@ 0957-4484
%C Bristol
%I IOP Publ.
%M PreJuSER-36957
%P s122 - s125
%D 2004
%Z Record converted from VDB: 12.11.2012
%X SrZrO3 thin films grown by pulsed laser deposition on SrRuO3-buffered SrTiO3 substrates have been investigated by means of x-ray diffraction, atomic force microscopy and Rutherford backscattering spectroscopy. The compressive stress originated in the coherent SrZrO3/SrRuO3 interface due to the lattice mismatch (approximate to-4.5%) forces epitaxial SrZrO3 to grow in a three-dimensional habit. So-deposited SrZrO3 is used to fabricate nanoarrays of dielectric wires from a nanopatterned SrRuO3 surface. The influence of the geometric shadowing effect produced by the non-perpendicular incidence of the ablated particles on the SrZrO3 growth habit is discussed.
%K J (WoSType)
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000221143400003
%R 10.1088/0957-4484/15/4/002
%U https://juser.fz-juelich.de/record/36957