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@ARTICLE{Karthuser:36957,
author = {Karthäuser, S. and Vasco Matias, E. and Dittmann, R. and
Waser, R.},
title = {{F}abrication of arrays of {S}r{Z}r{O}3 nanowires by pulsed
laser deposition},
journal = {Nanotechnology},
volume = {15},
issn = {0957-4484},
address = {Bristol},
publisher = {IOP Publ.},
reportid = {PreJuSER-36957},
pages = {s122 - s125},
year = {2004},
note = {Record converted from VDB: 12.11.2012},
abstract = {SrZrO3 thin films grown by pulsed laser deposition on
SrRuO3-buffered SrTiO3 substrates have been investigated by
means of x-ray diffraction, atomic force microscopy and
Rutherford backscattering spectroscopy. The compressive
stress originated in the coherent SrZrO3/SrRuO3 interface
due to the lattice mismatch (approximate $to-4.5\%)$ forces
epitaxial SrZrO3 to grow in a three-dimensional habit.
So-deposited SrZrO3 is used to fabricate nanoarrays of
dielectric wires from a nanopatterned SrRuO3 surface. The
influence of the geometric shadowing effect produced by the
non-perpendicular incidence of the ablated particles on the
SrZrO3 growth habit is discussed.},
keywords = {J (WoSType)},
cin = {IFF-IEM / CNI},
ddc = {530},
cid = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB381},
pnm = {Materialien, Prozesse und Bauelemente für die Mikro- und
Nanoelektronik},
pid = {G:(DE-Juel1)FUEK252},
shelfmark = {Nanoscience $\&$ Nanotechnology / Materials Science,
Multidisciplinary / Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000221143400003},
doi = {10.1088/0957-4484/15/4/002},
url = {https://juser.fz-juelich.de/record/36957},
}