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@PHDTHESIS{Roschek:37403,
author = {Roschek, Tobias},
title = {{M}icrocrystalline silicon solar cells prepared by 13.56
{MH}z {PECVD} : prerequisites for high quality material at
high growth rates},
volume = {4083},
issn = {0944-2952},
school = {Univ. Düsseldorf},
type = {Dr. (Univ.)},
address = {Jülich},
publisher = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
reportid = {PreJuSER-37403, Juel-4083},
series = {Berichte des Forschungszentrums Jülich},
pages = {VIII, 106 p.},
year = {2003},
note = {Record converted from VDB: 12.11.2012; Düsseldorf, Univ.,
Diss., 2003},
abstract = {Topic of this thesis was the development of thin film solar
cells based on microcrystalline silicon prepared by 13.56
MHz PECVD (plasma-enhanced chemical vapor deposition) at
high deposition rates. Comprehensive solar cell studies,
which were accompanied by material studies, resulted in the
identification of the most important prerequisites for high
quality solar cells at high growth rates. During the
development of solar cells in various pressure regimes, a
high deposition pressure emerged as key parameter for good
solar cell performance at high deposition rates. Plasma
ignition at high deposition pressures (>10 Torr) was only
possible at low electrode distances. Other important factors
were a high total gas flow and a substrate temperature,
which should not exceed $\sim$200 °C. As alternative
approach deposition by pulsed plasma excitation was
investigated. At deposition rates up to $\sim$5
$\mathring{A}$/s efficiencies comparable to continuous
excitation were achieved, at higher rates the efficiency
significantly decreased. In summary we succeeded in
developing high quality solar cells at high deposition
rates. Highlights were solar cells with 9.1, 9.0 and 8.9 \%
efficiency for deposition rates of 1, 3 and 4
$\mathring{A}$/s, respectively. At 9 $\mathring{A}$/s still
a high efficiency of 7.9 \% was achieved. Furthermore we
gained an understanding of the prerequisites regarding the
plasma properties to achieve high growth rates and high
quality material.},
cin = {IPV},
cid = {I:(DE-Juel1)VDB46},
pnm = {Photovoltaik},
pid = {G:(DE-Juel1)FUEK247},
typ = {PUB:(DE-HGF)11 / PUB:(DE-HGF)3},
url = {https://juser.fz-juelich.de/record/37403},
}