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000037404 1001_ $$0P:(DE-Juel1)VDB5981$$aRepmann, Tobias$$b0$$eCorresponding author$$uFZJ
000037404 245__ $$aStapelsolarzellen aus amorphem und mikrokristallinem Silizium
000037404 260__ $$aJülich$$bForschungszentrum Jülich GmbH Zentralbibliothek, Verlag$$c2003
000037404 300__ $$aVI, 156 p.
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000037404 4900_ $$0PERI:(DE-600)2414853-2$$813485$$aBerichte des Forschungszentrums Jülich$$v4082$$x0944-2952
000037404 502__ $$aAachen, Techn. Hochsch., Diss., 2003$$bDr. (FH)$$cTechn. Hochsch. Aachen$$d2003
000037404 500__ $$aRecord converted from VDB: 12.11.2012
000037404 520__ $$aThis work adresses the development of silicon thin film solar modules based on amorphous (a-Si:H) and microcrystalline silicon $\mu$c-Si :H) on 30x30 cm$^{2}$ substrate size using plasma enhanced chemical vapor deposition (PECVD). Commercially available SnO$_{2}$-coated glass or textured ZnO-coated glas prepared inhouse at the IPV by magnetron sputtering and post deposition wet chemical etching served as substrate. We applied 13.56 MHz plasma excitation frequency for the deposition of all silicon films. The reconstructions of the PECVD reactor and the development of an adapted electrode were required to provide homogeneous deposition in a regime of high deposition pressures and plasma powern. The intrinsic $\mu$c-Si:H films were prepared at deposition rates of 0.5-1 nm/s and showed excellent material quality. This was proven by $\mu$c-Si:H p-i-n cells yielding efficiencies up to 9.4 %. A-Si:H p-i-n cells were prepared using different types of a-Si:H i-layers to select the best suited for a-Si:H/$\mu$c-Si:H tandem cells. Finally, such tandem cells were realised yielding up to 11.2 % stabilised cell efficiency (cell size 1 cm$^{2}$). The current matching behaviour was studied experimentally by a variation of top and bottom cell i-layer thicknesses. A further understanding was obtained by simulating 1-V curves in the initial and stabilised state. First a-Si:H/$\mu$c-Si:H solar modules on 30x30 cm$^{2}$ substrate size were realised on SnO$_{2}$-substrates in close co-operation wich RWE SCHOTT Solar GmbH and lacer using texture-etched ZnO:Al-coated glass substrates. The latter showed initial efficiencies of 10.7 % and 9.7 % on aperture areas of 64 cm$^{2}$ and 689 cm$^{2}$, respectively.
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000037404 9201_ $$0I:(DE-Juel1)VDB46$$d31.12.2006$$gIPV$$kIPV$$lInstitut für Photovoltaik$$x0
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