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@PHDTHESIS{Tnnesmann:37449,
author = {Tönnesmann, Andreas},
title = {{U}ntersuchung von pseudomorphen
{I}n{G}a{A}s/{I}n{A}l{A}s/{I}n{P} {H}igh {E}lectron
{M}obility {T}ransistoren im {H}inblick auf kryogene
{A}nwendungen},
volume = {4043},
issn = {0944-2952},
school = {Techn. Hochsch. Aachen},
type = {Dr. (FH)},
address = {Jülich},
publisher = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
reportid = {PreJuSER-37449, Juel-4043},
series = {Berichte des Forschungszentrums Jülich},
pages = {II, 119 p.},
year = {2003},
note = {Record converted from VDB: 12.11.2012; Aachen, Techn.
Hochsch., Diss., 2003},
abstract = {A wide variety of new data communication applications
demand ever-increasing transmission capacities. The
InGaAs/InAlAs/InP layer stack based High Electron Mobility
Transistor (HEMT) is currently regarded as the most
promising active device in communication systems as it has
the highest cut-off frequencies of all transistor types. Due
to reduced phonon scattering of the charge carriers, the
HEMT is expected to exhibit even better noise and high
frequency characteristics for operations at cryogenic
temperatures, for instance in mixers or oscillators located
in satellites or ground based systems with appropriate
cooling equipment. This work focuses an the reduction of
access resistances and the fabrication of very short gate
lengths as the biggest technological challenges realizing
highest cut-off frequencies at any temperature. In addition,
the reproducibility and robustness of the implemented gate
technologies are fundamental criteria for applications. In
comparison to other transistor designs, the InAlAs/InGaAs
HEMTs are stronger affected by undesirable, partly material
dependent, short channel effects like early breakdown, high
gate currents, impact ionization, the kink effect, and a
shift in the threshold voltage. Measurements at liquid
nitrogen temperature an transistors produced in this work
provide further insight into the poorly understood
interrelationship between these effects. At liquid nitrogen
temperature, the cut-off frequency of 180 GHz and the
maximum oscillation frequency of 300 GHz of short channel
transistors at room temperature increase by 20 $\%$ and 30
$\%,$ respectively, while the breakdown voltage remains at
high values above 8 V.},
cin = {ISG-1},
cid = {I:(DE-Juel1)VDB41},
pnm = {Materialien, Prozesse und Bauelemente für die Mikro- und
Nanoelektronik},
pid = {G:(DE-Juel1)FUEK252},
typ = {PUB:(DE-HGF)11 / PUB:(DE-HGF)3},
url = {https://juser.fz-juelich.de/record/37449},
}