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@ARTICLE{Jiang:37843,
author = {Jiang, X. and Jia, C. L. and Szameitat, M. and Rickers, C.},
title = {{E}pitaxy of diamond on {S}i(100) and
surface-roughening-induced crystal misorientation},
journal = {Physical review / B},
volume = {64},
number = {24},
issn = {0163-1829},
address = {College Park, Md.},
publisher = {APS},
reportid = {PreJuSER-37843},
pages = {245413},
year = {2001},
note = {Record converted from VDB: 12.11.2012},
abstract = {In a recent paper [Phys. Rev. Lett. 84, 3658 (2000)] a
direct diamond epitaxy on the silicon substrate is
demonstrated not only at the interface formed during the
growth process but also at the nucleation sites. Small (001)
terraces with dimensions of several atomic distances at the
site of nucleation are observed due to the roughening of
silicon surface and lead to the grain misorientation, To
further improve the understanding of the subject the
microstructure and interfaces in diamond films on silicon
substrates grown in the stages of the bias-enhanced
nucleation (BEN) and the initial crystal growth were studied
by means of atomic force microscopy, scanning electron
microscopy, and high-resolution transmission electron
microscopy. It is showed that the roughness of the wafer
starts to increase from the beginning of the BEN and the
renucleation on existing crystallites induced by the ion
bombardment leading to the loss of epitaxy.},
keywords = {J (WoSType)},
cin = {IFF-IMF},
ddc = {530},
cid = {I:(DE-Juel1)VDB37},
pnm = {Festkörperforschung für die Informationstechnik},
pid = {G:(DE-Juel1)FUEK54},
shelfmark = {Physics, Condensed Matter},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000173082500107},
doi = {10.1103/PhysRevB.64.245413},
url = {https://juser.fz-juelich.de/record/37843},
}