% IMPORTANT: The following is UTF-8 encoded. This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.
@ARTICLE{Bruhaus:3952,
author = {Bräuhaus, D. and Schindler, C. and Böttger, U. and Waser,
R.},
title = {{R}adiofrequency sputter deposition of germanium-sselenide
thin films for resistive switching},
journal = {Thin solid films},
volume = {516},
issn = {0040-6090},
address = {Amsterdam [u.a.]},
publisher = {Elsevier},
reportid = {PreJuSER-3952},
pages = {1223 - 1226},
year = {2008},
note = {Record converted from VDB: 12.11.2012},
abstract = {The superionic conducting properties of Ag-doped GeSe thin
films make this material a promising candidate for future,
resistively switching-based memories allowing for high
integration densities and short switching times. This paper
reports on the radiofrequency sputter deposition of GeSe
thin films and on the properties of the deposited thin films
with respect to non-volatile memory applications. As sputter
deposition is a widely used deposition method for industrial
applications, we focused on the influences of deposition
parameters as power and pressure to examine the suitability
of sputter deposition for fabricating random access memories
using GeSe-based resistive memory cells. Multiple
characterization methods were utilized to determine the
quality of the deposited thin films. The results of our
measurements showed that we obtained smooth, dense and
amorphous layers, which reveal good switching properties
after doping with Ag, suitable for the use in GeSe-based
memories. (C) 2007 Elsevier B.V. All rights reserved.},
keywords = {J (WoSType)},
cin = {IFF-6 / JARA-FIT / CNI},
ddc = {070},
cid = {I:(DE-Juel1)VDB786 / $I:(DE-82)080009_20140620$ /
I:(DE-Juel1)VDB381},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Materials Science, Multidisciplinary / Materials Science,
Coatings $\&$ Films / Physics, Applied / Physics, Condensed
Matter},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000252980400056},
doi = {10.1016/j.tsf.2007.05.074},
url = {https://juser.fz-juelich.de/record/3952},
}