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@ARTICLE{Reichenberg:40435,
author = {Reichenberg, B. and Szot, K. and Schneller, T. and Breuer,
U. and Tiedke, S. and Waser, R.},
title = {{I}nhomogeneous {L}ocal {C}onductivity {I}nduced by
{T}hermal {R}eduction in {B}a{T}i{O}3 {T}hin {F}ilms and
{S}ingle {C}rystals},
journal = {Integrated ferroelectrics},
volume = {61},
issn = {1058-4587},
address = {London [u.a.]},
publisher = {Taylor $\&$ Francis},
reportid = {PreJuSER-40435},
pages = {43 - 49},
year = {2004},
note = {Record converted from VDB: 12.11.2012},
abstract = {The potential of perovskite type materials for
microelectronic applications depends on a detailed
understanding of their electrical properties, especially
their intrinsic charge transport mechanisms. This paper
focuses on the analysis of conducting mechanisms after a
thermal reduction process with a resolution in a nanoscale
regime. It is known that thermal reduction leads to a
decrease in the samples' resistivity. We show that this
decrease might be caused by an inhomogeneous distribution of
local conductivity paths. Further we investigated the
properties of these paths by secondary ion mass spectrometry
(SIMS) and atomic force microscopy (AFM) to find the
mechanism which leads to this phenomenon. Furthermore, we
show that the occurrence of local current paths can be
partially reversed by an re-oxidation process at elevated
temperatures.},
keywords = {J (WoSType)},
cin = {IFF-IEM / ZCH / CNI},
ddc = {620},
cid = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)ZCH-20090406 /
I:(DE-Juel1)VDB381},
pnm = {Materialien, Prozesse und Bauelemente für die Mikro- und
Nanoelektronik},
pid = {G:(DE-Juel1)FUEK252},
shelfmark = {Engineering, Electrical $\&$ Electronic / Physics, Applied
/ Physics, Condensed Matter},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000222470500006},
doi = {10.1080/10584580490458865},
url = {https://juser.fz-juelich.de/record/40435},
}