%0 Conference Paper
%A Moers, J.
%A Trellenkamp, S.
%A Vescan, L.
%A Marso, M.
%A Kordos, P.
%A Lüth, H.
%T Vertical double-gate MOSFET based on epitaxial growth by LPCVD
%M PreJuSER-40697
%@ 2-914601-01-8
%D 2001
%Z Record converted from VDB: 12.11.2012
%< Proceedings of the 31st European Solid-State Development Research Conference / ed. H. Ryssel ... - 2001. - 2-914601-01-8. - S. 191
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/40697