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100 1 _ |a Moers, J.
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245 _ _ |a Vertical double-gate MOSFET based on epitaxial growth by LPCVD
260 _ _ |c 2001
295 1 0 |a Proceedings of the 31st European Solid-State Development Research Conference / ed. H. Ryssel ... - 2001. - 2-914601-01-8. - S. 191
336 7 _ |a Contribution to a conference proceedings
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536 _ _ |a Halbleiterbauelemente und Analytik
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536 _ _ |a Halbleiterschichtsysteme und Mesoskopische Strukturen
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700 1 _ |a Trellenkamp, S.
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700 1 _ |a Vescan, L.
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700 1 _ |a Marso, M.
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700 1 _ |a Kordos, P.
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700 1 _ |a Lüth, H.
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Marc 21